JPH0371857U - - Google Patents
Info
- Publication number
- JPH0371857U JPH0371857U JP13335189U JP13335189U JPH0371857U JP H0371857 U JPH0371857 U JP H0371857U JP 13335189 U JP13335189 U JP 13335189U JP 13335189 U JP13335189 U JP 13335189U JP H0371857 U JPH0371857 U JP H0371857U
- Authority
- JP
- Japan
- Prior art keywords
- rotating plate
- polisher
- polishing
- bottom part
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 8
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13335189U JPH0371857U (en]) | 1989-11-16 | 1989-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13335189U JPH0371857U (en]) | 1989-11-16 | 1989-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0371857U true JPH0371857U (en]) | 1991-07-19 |
Family
ID=31680759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13335189U Pending JPH0371857U (en]) | 1989-11-16 | 1989-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0371857U (en]) |
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1989
- 1989-11-16 JP JP13335189U patent/JPH0371857U/ja active Pending